Immersion catadioptric projection objective having two intermediate images

摘要

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D_max, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=D_max/(Y′·NA²) and wherein the condition COMP110 holds.