Projection exposure system comprising a catadioptric projection objective with intermediate images

摘要

an array pattern on an object plane of the projection objective lens as a catadioptric projection objective for imaging onto the image plane of the projection objective lens, for imaging the object field into the first intermediate image Room a first objective part for and, by using the radiation from the first objective part for imaging the second objective lens section and the second intermediate image yarn on the image plane for generating a room second intermediate image 3 and a portion of the objective lens. The second objective lens part is a catadioptric objective part with a concave mirror. The second kkeokeum mirror for deflecting the radiation from the first mirror and kkeokeum kkeokeum mirror for deflecting the radiation from the object plane to the concave mirror in the direction of the image plane direction are provided. The field lens of the phage creative refractive power is arranged in a region adjacent to the field in the first intermediate image between the first intermediate image and / or the first mirror and the concave mirror kkeokeum.