Catadioptric projection objective with intermediate images

摘要

A catadioptric projection objective for imaging a pattern arranged on an object plane of a projection objective on an image plane of a projection objective, comprising: a first objective lens portion for imaging an object field into a real first intermediate image; A second objective portion for generating an actual second intermediate image using the radiation from the first objective portion and a third objective portion for imaging the actual second intermediate image on the image plane. The second objective portion is a catadioptric objective portion having a concave mirror. A first bending mirror for deflecting the radiation from the object plane toward the concave mirror and a second bending mirror for deflecting the radiation from the bending mirror toward the image plane. A field lens of positive refractive power is disposed in the area between the first intermediate image and / or the first bend mirror and the concave mirror adjacent to the field of the first intermediate image.