COMPOSITE MICROSCOPE COMBINING SCANNING PROBE MICROSCOPE AND OPTICAL MICROSCOPE; CONTROL DEVICE, CONTROL METHOD, AND CONTROL PROGRAM THEREFOR; AND RECORDING MEDIUM

摘要

A compound microscope (10) comprises an optical microscope (11) to acquire dynamic optical microscope observation data of a sample (S), a scanning probe microscope (12) to acquire dynamic SPM observation data of the sample (S), and a control device to simultaneously give a common control command to the optical microscope (11) and the scanning probe microscope (12).