Method for refilling an evaporation cell

摘要

the present invention relates to a process for charging a cell (10) for evaporating a material (7) is evaporated on a substrate placed in a vacuum deposition chamber, a first crucible (110) containing the materials to be evaporated is engaged with a u00e9vapor room e (100) of the evaporation unit, and means (101).(132) are provided in the first crucible evaporation conditions to generate a flow of steam (116) of the material.;this method includes a step of charging load of a crucible (120) containing a second material to be evaporated in a loading chamber (200) previously isolated from the evaporation chamber attached.the pressure in the chamber is then load is significantly higher than that in the vacuum deposition chamber; and a step of containment in order to bring the pressure in the chamber to load to a level comparable to that of the evaporation chamber at the evaporation of the first crucible; a step in which the first release pot is transferred.so the house of load, a second step of engagement with the chamber pot evaporation stage, and a second crucible evaporation conditions.