BOTTLE EXCHANGING DEVICE, SUBSTRATE PROCESSING APPARATUS, BOTTLE EXCHANGING METHOD, BOTTLE CAP, BOTTLE CAP EXCHANGING DEVICE AND BOTTLE CAP EXCHANGING METHOD

摘要

Provided is a bottle exchanging device capable of preventing dust from penetrating into a bottle in replacing the bottle. Also, provided is a bottle cap capable of stable connection with a pipe for process solution. A bottle (B) has a cap (C). The cap (C) includes a straw part (C40) for process solution and a connection part (C45) for process solution. The straw part (C40) for process solution forms a flow path (R1) for process solution and is extended to the bottle (B). The connection part (C45) for process solution is installed to the end part of the straw part (C40). A chemical cart (31) includes a connection tool part (D20) which is connected to the connection part (45) for process solution of the bottle (B) and has the pipe (D45) for process solution where a process solution supplied from the bottle (B) flows, a slid rotation tool part (D60) which transfers the bottle (B) to a connection position of connecting the connection part (45) for process solution and the pipe (D45) for process solution.;COPYRIGHT KIPO 2015