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A MEMS SENSOR STRUCTURE FOR SENSING PRESSURE WAVES AND A CHANGE IN AMBIENT PRESSURE
A MEMS SENSOR STRUCTURE FOR SENSING PRESSURE WAVES AND A CHANGE IN AMBIENT PRESSURE
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机译:用于感测压力波和环境压力变化的MEMS传感器结构
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摘要
A sensor structure including a first diaphragm structure, an electrode element, and a second diaphragm structure arranged on an opposite side of the electrode element from the first diaphragm structure is disclosed. The sensor structure may also include a chamber formed by the first and second diaphragm structures, where a pressure in the chamber is lower than the pressure outside the chamber. A method to form the sensor structure is likewise disclosed.
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