MEMS A MEMS SENSOR STRUCTURE FOR SENSING PRESSURE WAVES AND A CHANGE IN AMBIENT PRESSURE

摘要

Disclosed is a sensor structure comprising a first diaphragm structure, an electrode element, and a second diaphragm structure arranged on the opposite side of the electrode element from the first diaphragm structure. The sensor structure may also include a chamber formed by the first and second diaphragm structures, wherein the pressure in the chamber is lower than the pressure outside the chamber. A method of forming a sensor structure is also disclosed.