首页> 外国专利> DICING/DIE BONDING INTEGRAL FILM, DICING/DIE BONDING INTEGRAL FILM MANUFACTURING METHOD, AND SEMICONDUCTOR CHIP MANUFACTURING METHOD

DICING/DIE BONDING INTEGRAL FILM, DICING/DIE BONDING INTEGRAL FILM MANUFACTURING METHOD, AND SEMICONDUCTOR CHIP MANUFACTURING METHOD

机译:切割/管芯键合集成膜,切割/管芯键合集成膜制造方法以及半导体芯片制造方法

摘要

An object of the present invention is to suppress the peeling of the peripheral edge portion of the adhesive layer from the pressure-sensitive adhesive layer in the dicing step of the semiconductor wafer. The dicing die-bonding integrated film of the present invention comprises a base film, a pressure-sensitive adhesive layer formed on the base film and to which a wafer ring used for dicing the blade is pasted, a pressure- Wherein the area of the adhesive layer is larger than the area of the semiconductor wafer and smaller than the area of each of the base film and the pressure-sensitive adhesive layer The diameter of the adhesive layer is larger than the diameter of the semiconductor wafer and smaller than the inner diameter of the wafer ring. The difference between the diameter of the adhesive layer and the diameter of the semiconductor wafer is larger than 20 mm and smaller than 35 mm.
机译:本发明的目的是在半导体晶片的切割步骤中抑制粘合剂层的周缘部从压敏粘合剂层剥离。本发明的切割/芯片接合一体薄膜包括:基膜;在该基膜上形成的压敏胶粘剂层;在该胶粘剂层上粘贴有用于切割刀片的晶片环;在该压敏胶粘剂区域中,层大于半导体晶片的面积,并且小于基膜和压敏胶粘剂层的每个的面积。胶粘剂层的直径大于半导体晶片的直径,并且小于半导体晶片的内径。晶圆环。粘合剂层的直径与半导体晶片的直径之间的差大于20mm且小于35mm。

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