acid generator which contains a suitable salt and a chemically amplified positive resist composition

摘要

The present invention provides a salt of formula (I). ; formula I ; Formula 1 In, Q ¹ and Q ² are each independently a fluorine atom or a C1-C6 perfluoroalkyl group, and T is the methylene group or carbonyl group, the R is C1-C4 alkyl group, C1-C4 alkoxy group, a hydroxyl group, a hydroxymethyl group, a cyano group, and one or more substituted adamantyl group with substituents selected from the group consisting of an oxo group, A ⁺ is an organic counterion. ; This invention further provides a chemically amplified resist composition comprising a salt of formula (I) mentioned above. ; The resist composition, acid generator