A salt suitable for an acid generator and a chemically amplified positive resist composition containing the same

摘要

The present invention provides a salt of formula (I). ; formula I ; the above formula in 1, ; and at least one X is a divalent C3-C30 2 is a group containing an alicyclic hydrocarbon group, the C3-C30 2 is one or more from the group -CH ₂ - may be replaced by -O- or -CO-, ; Y is C1-C6 alkoxy group, C1-C4 perfluoroalkyl group, C1-C6 hydroxyalkyl group, hydroxyl cyano group and C3-C30 cyclic hydrocarbon group which may be substituted with one or more groups selected from the group, and the C3-C30 cyclic hydrocarbon group at one or more -CH ₂ - is -O- or - may be substituted by CO-, ; Q ¹ and Q ² are each independently an alkyl group, a fluorine atom or a C1-C6 perfluoroalkyl, and , ; A ⁺ is an organic counter ions. ; acid-generating agent, a chemically amplified positive resist composition, a resin, a structural unit