ALIGNMENT OFF-SET CALCULATION METHOD OF SHAPE MEASUREMENT DEVICE AND CONTROL METHOD OF SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an alignment off-set calculation method of a shape measurement device and control method of the shape measurement device that allow a detection point of a point sensor to be easily and quickly aligned with a measurement start point.SOLUTION: Alignment means is composed of two or more laser light sources 231 and 232 disposed in an area around a point sensor 200, in which laser light LA from two or more laser light sources 231 and 232 intersects at an adjustment Pc serving as a position further separated from the point sensor 200 by a prescribed distance from the detection point Ps. The alignment means is configured to: calculate off-set with the adjustment point aligned with a photoelectric sensor; relatively move the point sensor 200 and a work W by the off-set after aligning the adjustment point Pc with a desired measurement start point Pm on the work W, and then, cause the point sensor 200 to come proximity to the work W; and start a measurement scanning of the work W.SELECTED DRAWING: Figure 5