INNER SURFACE SHAPE MEASUREMENT DEVICE, ALIGNMENT METHOD FOR INNER SURFACE SHAPE MEASUREMENT DEVICE, AND MAGNIFICATION CALIBRATION METHOD

摘要

Provided are an inner surface shape measurement device which can properly align the position of a probe, and an alignment method for the inner surface shape measurement device. This inner surface shape measurement device is for measuring an inner surface shape of a small hole H formed in a workpiece W, the device comprising: a rotary body 16 and a direct acting tilt stage 18 for rotating the workpiece W about a rotation axis; an elongated probe 30 which can be inserted into the small hole H of the workpiece; a probe direct acting tilt mechanism 28 which can adjust the orientation of the probe; a camera 32 which is configured to be rotatable integrally with the rotary body 16 and captures an image of the probe 30 from at least three circumferential positions on a rotation trajectory about a rotation axis C; and a control device 50 for adjusting the orientation of the probe through the probe direct acting tilt mechanism 28 on the basis of a captured image captured by the camera 32 at each of the circumferential positions.