MEASUREMENT OBJECT ALIGNMENT METHOD IN SURFACE SHAPE MEASUREMENT DEVICE AND SURFACE SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface shape measurement device and alignment method that can simply, quickly and accurately implement an alignment (a tilt angle adjustment) of a measurement object regardless of a degree of skill of operators.SOLUTION: In a Mireau type scan type white interferometer performing a three-dimensional measurement of a surface shape of a measurement object and the like in a non-contact, an adjustment area (reference area 100, an x-axis levelling adjustment area 110 and a y-axis levelling area 120) is set up at three sites with respect to a measured face (interference image of the measured face) of the measurement object as a preparation work prior to a measurement, and positions in a z-axis direction of the adjustment areas are detected. Then, a tilt angle of a stage supporting the measurement object is adjusted so that the positions in the z-axis direction of the adjustment areas match to thereby align the positions therein so that the measured face of the measurement object is horizontal.SELECTED DRAWING: Figure 13