FRONT FACE SHAPE MEASUREMENT DEVICE MEASUREMENT PREPARATION ALIGNMENT METHOD, AND FRONT FACE SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To easily, quickly and correctly make focus adjustments, and adjustments of an angle of inclination without relying upon an operator's learning level, and provoking increase in device costs.;SOLUTION: A measurement preparation alignment method of a front surface shape measurement device detecting an interference fringe position in a Z-axis direction of each point of a measured face on the basis of an interference fringe to be acquired by an imaging unit as changing an optical path length of measurement light with which each point of the measured face is irradiated has: an intentional inclination step S10 of causing an angle of inclination of a measured face with respect to a measurement optical axis to be intentionally inclined at a preset setting angle of inclination θ2; an interference fringe retrieval step S14 of retrieving the interference fringe by the imaging unit as changing an optical path length of measurement light with which each point of the measured face inclined at the setting angle of inclination θ2 is irradiated; an interference fringe position step S16 of detecting an interference fringe position from the interference fringe obtained by the retrieval; and a focus adjustment step S20 of making adjustments so that a focus position of an optical unit focus on the detected interference fringe position.;SELECTED DRAWING: Figure 6;COPYRIGHT: (C)2018,JPO&INPIT