SILICON NITRIDE SPHEROID, MANUFACTURING METHOD OF SILICON NITRIDE SPHEROID, AND INSPECTION METHOD OF SILICON NITRIDE SPHEROID

摘要

PROBLEM TO BE SOLVED: To provide: a silicon nitride spheroid having reduced unevenness such as a flaw or a polishing trace on the surface; a manufacturing method of a silicon nitride spheroid; and an inspection method of a silicon nitride spheroid for inspecting the silicon nitride spheroid.;SOLUTION: A manufacturing method of a silicon nitride spheroid includes steps for: preparing a plurality of spheroids 1 containing silicon nitride as a main constituent material, metal oxide powder having a lower hardness than the spheroid 1, and a dispersant 2; and slide-contacting each spheroid 1 by mixing together the plurality of spheroids 1, the metal oxide powder and the dispersant 2.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT