Photoluminescence of Silicon Nitride-Embedded Silicon Nanocrystallites Prepared by Thermal Annealing of Si-Rich Silicon Nitride

摘要

Silicon nanocrystallites embedded in silicon nitride were prepared by high-temperature annealing of silicon-rich silicon nitride (SRN) via the phase separation reaction. Chemical composition and bonding structures of the SRN were explored using X-ray phot