METHOD OF MATCHING MEASUREMENT CENTER POSITIONS WHEN MEASURING THICKNESS OF LIQUID WITH OPTICAL INTERFERENCE MEASUREMENT MEANS AND ULTRASONIC MEASUREMENT MEANS, AND METHOD OF MEASURING LIQUID THICKNESS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of matching measurement center positions when measuring the thickness of liquid with optical interference measurement means and ultrasonic measurement means for comparing and evaluating measurement results by obtaining the more correct measurement results with the optical interference measurement means and the ultrasonic measurement means on the thickness of liquid filled in a portion of a space formed in the periphery of a contact surface between a first member and a second member, and a method of measuring the liquid thickness using the same.;SOLUTION: A method of matching measurement center positions comprises: an optical interference fringe measurement step of measuring with optical interference measurement means an optical interference fringe formed by emitting measurement light to a second member from the lower side to the upper side thereof and a first member from the upper side to the lower side thereof; a measurement center mark application step of positioning a specification part of a measurement positioning jig to the center of the optical interference fringe; an ultrasonic scanning step of scanning an ultrasonic probe so as to pass through the specification part to detect at least one of the echo intensity and reflection relevant time; and an ultrasonic measurement center setting step of setting the detected position of the specification part to the ultrasonic measurement center position.;SELECTED DRAWING: Figure 14;COPYRIGHT: (C)2016,JPO&INPIT