Maintenance cost calculation method of the maintenance cost calculation system and particle detection apparatus of the particle detection equipment

摘要

PROBLEM TO BE SOLVED: To provide a maintenance cost calculation system for a particle detection device that can calculate maintenance costs for a particle detection device.;SOLUTION: A maintenance cost calculation system for a particle detection device includes a particle detection device 20 having a humidity meter inside; a relation storage device 401 which store the relation between the humidity in the particle detection device 20 and maintenance costs for components of the particle detection device 20 for each of the components of the particle detection device 20; an individual cost specification part 301 which specifies maintenance costs for each of the components of the particle detection device 20 upon the basis of the relation and a value of the humidity in the particle detection device 20 that the humidity meter measures; and a total cost calculation part 302 which calculates the total of maintenance costs.;COPYRIGHT: (C)2014,JPO&INPIT