Ultrasonic sensors, the manufacturing method of ultrasonic array sensor and ultrasonic sensor

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic array sensor which inhibits characteristic vibrations between multiple sensor elements and obtains desired yield, and to provide a manufacturing method of the ultrasonic array sensor.SOLUTION: In an ultrasonic array sensor having multiple sensor elements 2, each sensor element 2 has a recessed part 10 formed at an insulation film 22 and protection films located on the recessed part 10 and a bottom layer of a diaphragm 9. A lower electrode 28a, a piezoelectric body layer 29, and an upper electrode 30a are formed on the diaphragm 9. A cavity 12 is formed in the recessed part 10, and a hole 11 is formed in the cavity 12 so as to penetrate through the diaphragm 9.