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Yield enhancing vertical redundancy method for 3D wafer level packaged (WLP) integrated circuit systems

机译:用于3D晶圆级封装(WLP)集成电路系统的提高产量的垂直冗余方法

摘要

A three-dimensional wafer level packaged (WLP) integrated circuit that includes a pair of opposing circuit cells fabricated on separate wafers that have been bonded together to provide vertical circuit redundancy. The integrated circuits on each of the separate wafers are performance tested prior to the wafers being bonded together so as to designate good performing circuits as active circuit cells and poor performing circuits as inactive circuit cells. The inactive circuit cell for a particular pair of integrated circuits is metalized with a short circuiting metal layer to make it inoperable. The WLP integrated circuit implements a yield-enhancing circuit redundancy scheme on spatially uncorrelated wafers that avoids wasting valuable wafer x-y planar area, which provides cost savings as a result of more wafer area being available for distinct circuits on each wafer rather than sacrificed for traditional side-by-side redundant copies of circuits.
机译:一种三维晶圆级封装(WLP)集成电路,包括一对在单独的晶圆上制造的相对的电路单元,这些晶圆已结合在一起以提供垂直电路冗余。在将晶片粘合在一起之前,对每个单独晶片上的集成电路进行性能测试,以便将性能良好的电路指定为有源电路单元,将性能较差的电路指定为非有源电路单元。用于特定一对集成电路的非活动电路单元被金属化并带有短路金属层,以使其无法工作。 WLP集成电路在空间上不相关的晶圆上实施了提高良率的电路冗余方案,避免了浪费宝贵的晶圆xy平面面积,由于每个晶圆上的不同电路可使用更多的晶圆面积,而不是牺牲传统的晶圆面,从而节省了成本电路的并行冗余副本。

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