首页>
外国专利>
STRUCTURES AND DEVICES INCLUDING GERMANIUM-TIN FILMS AND METHODS OF FORMING SAME
STRUCTURES AND DEVICES INCLUDING GERMANIUM-TIN FILMS AND METHODS OF FORMING SAME
展开▼
机译:包括锗锡薄膜的结构和装置及其形成方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Methods of forming germanium-tin films using germane as a precursor are disclosed. Exemplary methods include growing films including germanium and tin in an epitaxial chemical vapor deposition reactor, wherein a ratio of a tin precursor to germane is less than 0.1. Also disclosed are structures and devices including germanium-tin films formed using the methods described herein.
展开▼