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PRESSURE SENSING AND FLOW CONTROL IN DIFFUSION-BONDED PLANAR DEVICES FOR FLUID CHROMATOGRAPHY
PRESSURE SENSING AND FLOW CONTROL IN DIFFUSION-BONDED PLANAR DEVICES FOR FLUID CHROMATOGRAPHY
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机译:液相色谱扩散键合平面装置中的压力传感和流量控制
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摘要
Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region.
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