METHOD AND SYSTEM FOR FORMATION OF VERTICAL MICROVIAS IN OPAQUE CERAMIC THIN-PLATE BY FEMTOSECOND LASER PULSE

摘要

A method and system for formation of vertical microvias in an opaque ceramic thin-plate by femtosecond laser pulses are introduced. The method includes (a) thin an opaque ceramic substrate and reduce its thickness to a range of 20-100 μm to provide the ceramic thin-plate; (b) place the ceramic thin-plate on a carrier; and (c) drill the ceramic thin-plate by the femtosecond laser pulses, wherein the femtosecond laser pulses have the following parameters, including a pulse width 100 fs, a pulse frequency of 1,000˜10,000 Hz, a laser with a central wavelength of 800 nm, and a movable stage with a speed of 20-200 μm/s. Hence, vertical mirovias with high aspect ratio can be fabricated in an opaque ceramic thin-plate.