首页> 外国专利> Method for producing multiple-surface imposition vapor deposition mask, multiple-surface imposition vapor deposition mask obtained therefrom, and method for producing organic semiconductor element

Method for producing multiple-surface imposition vapor deposition mask, multiple-surface imposition vapor deposition mask obtained therefrom, and method for producing organic semiconductor element

机译:用于制造多表面沉积气相沉积掩模的方法,由此获得的用于多表面沉积气相沉积的掩模以及用于制造有机半导体元件的方法

摘要

A method for producing a multiple-surface imposition vapor deposition mask enhances definition and reduces weight even when a size is increased. Each of multiple masks in an open space in a frame is configured by a metal mask having a slit, and a resin mask that is positioned on a front surface of the metal mask and has openings corresponding to a pattern to be produced by vapor deposition arranged by lengthwise and crosswise in a plurality of rows. In formation of the plurality of masks, after each of the metal masks and a resin film material for producing the resin mask are attached to the frame, the resin film material is processed, and the openings corresponding to the pattern to be produced by vapor deposition are formed in a plurality of rows lengthwise and crosswise, whereby the multiple-surface imposition vapor deposition mask of the above described configuration is produced.
机译:用于制造多表面拼版气相沉积掩模的方法即使在尺寸增加时也能提高清晰度并减轻重量。框架的开放空间中的多个掩模中的每一个由具有狭缝的金属掩模和布置在金属掩模的前表面上并具有与将通过气相沉积产生的图案相对应的开口的树脂掩模构成。沿纵向和横向成多排排列。在形成多个掩模时,在将金属掩模和用于制造树脂掩模的树脂膜材料分别安装到框架上之后,对树脂膜材料进行处理,并形成与通过蒸镀而形成的图案对应的开口。沿纵向和横向以多行形成多个膜,从而产生具有上述构造的多表面施加气相沉积掩模。

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