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Systems and methods for controlling soft bias thickness for tunnel magnetoresistance readers

机译:用于控制隧道磁阻读取器的软偏置厚度的系统和方法

摘要

Systems and methods for controlling a thickness of a soft bias layer in a tunnel magnetoresistance (TMR) reader are provided. One such method involves providing a magnetoresistive sensor stack including a free layer and a bottom shield layer, performing contiguous junction milling on the sensor stack, depositing an insulating layer on the sensor stack, depositing a spacer layer on the insulating layer, performing an angled milling sub-process to remove preselected portions of the spacer layer, depositing a soft bias layer on the sensor stack, and depositing a top shield layer on the sensor stack and the soft bias layer. The method can further involve adjusting an alignment of a top surface of the spacer layer with respect to the free layer. In one such case, the top surface of the spacer layer is adjusted to be below the free layer.
机译:提供了用于控制隧道磁阻(TMR)读取器中的软偏置层的厚度的系统和方法。一种这样的方法涉及提供包括自由层和底部屏蔽层的磁阻传感器叠层,在传感器叠层上进行连续结铣削,在传感器叠层上淀积绝缘层,在绝缘层上淀积间隔层,进行成角度的铣削子工艺去除间隔层的预选部分,在传感器叠层上沉积软偏置层,以及在传感器叠层和软偏置层上沉积顶部屏蔽层。该方法可以进一步包括调整间隔层的顶表面相对于自由层的对准。在一种这样的情况下,将间隔层的顶表面调整为低于自由层。

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