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Self-bonding of chemically vapor deposited SiC articles
Self-bonding of chemically vapor deposited SiC articles
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机译:化学气相沉积SiC制品的自粘结
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摘要
Method and system for bonding two or more CVD SiC articles together without the use of interface materials using applied forces from about 0.0035 MPa to about 0.035 MPa. The articles are pretreated for bonding. Graphite or other fixtures are used to apply forces in a vacuum or inert gas environment. Temperatures from about 1900° C. to about 2200° C. are used to initiate a β→α transition in the SiC to create bonded CVS SiC articles.
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