Apparatus for inspecting warpage of sheet-like member and method for inspecting warpage of sheet-like member

摘要

An apparatus for inspecting warpage of a sheet-like member includes a conveyance device for conveying a glass substrate in a substantially horizontal attitude and a non-contact displacement meter for measuring a distance to a surface of the glass substrate. The apparatus is configured to preset an upper limit waveform and a lower limit waveform based on an ideal waveform of surface shape displacement of the glass substrate in a conveyance direction, which is determined based on a characteristic of the conveyance device; and determine whether or not an actual waveform of the surface shape displacement of the glass substrate in the conveyance direction during conveyance, which is obtained based on the distance measured by the non-contact displacement meter, falls within a range between the upper limit waveform and the lower limit waveform.