首页> 外国专利> DEFECT INSPECTION APPARATUS FOR INSPECTING SHEET-LIKE INSPECTION OBJECT, COMPUTER-IMPLEMENTED METHOD FOR INSPECTING SHEET-LIKE INSPECTION OBJECT, AND DEFECT INSPECTION SYSTEM FOR INSPECTING SHEET-LIKE INSPECTION OBJECT

DEFECT INSPECTION APPARATUS FOR INSPECTING SHEET-LIKE INSPECTION OBJECT, COMPUTER-IMPLEMENTED METHOD FOR INSPECTING SHEET-LIKE INSPECTION OBJECT, AND DEFECT INSPECTION SYSTEM FOR INSPECTING SHEET-LIKE INSPECTION OBJECT

机译:像板检查对象的缺陷检查装置,像板检查对象的计算机安装方法以及象板检查对象的缺陷检查系统

摘要

An apparatus divides a photographed image of a sheet-like inspection object into blocks each of which has a size of a predetermined number of pixels by a predetermined number of pixels, calculates a longitudinal variance based on pixel values in a longitudinal direction in each block and a lateral variance based on pixel values in a lateral direction in the block, determines whether the block is a defect candidate using the longitudinal variance and the lateral variance as sheet-like inspection object defect determination evaluation values, and determines, based on one of a length and an area of the blocks determined as the defect candidates, whether the sheet-like inspection object has defect.
机译:一种设备将片状检查对象的拍摄图像划分为每个块,每个块具有预定数量的像素除以预定数量的像素,基于每个块中纵向像素值计算纵向方差,并且基于块中的横向方向上的像素值的横向变化,使用纵向变化和横向变化作为片状检查对象缺陷确定评估值来确定块是否为缺陷候选,并基于以下之一确定片状检查对象是否有缺陷,确定为缺陷候选的块的长度和面积。

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