Method of reconstructing aspheric surface equations from measurements

摘要

Surface measurement data just provides the coordinates of an object surface without giving various parameters like the radius of curvature, conic constant, and deformation coefficients. In this paper, we propose a novel method for extracting the important parameters for the determination of unknown aspheric surface equations from the measurement of aspheric surfaces. The largest error between the original surface and the reconstructed surface in the theoretical case is shown to be about 8.6 nm. This fact implies that the new method is well suited for the reconstruction of unknown surface equations.