首页> 外国专利> FINE STRUCTURE OPTICAL MEMBER ANTIREFLECTION FILM WATER REPELLENT FILM SUBSTRATE FOR MASS SPECTROMETRY PHASE PLATE PROCESS FOR PRODUCING FINE STRUCTURE AND PROCESS FOR PRODUCING ANTIREFLECTION FILM

FINE STRUCTURE OPTICAL MEMBER ANTIREFLECTION FILM WATER REPELLENT FILM SUBSTRATE FOR MASS SPECTROMETRY PHASE PLATE PROCESS FOR PRODUCING FINE STRUCTURE AND PROCESS FOR PRODUCING ANTIREFLECTION FILM

机译:用于精细光谱相板的精细结构光学抗反射膜防水薄膜基质,用于生产精细结构和用于抗反射膜的过程

摘要

Provided are an antireflection film having a high antireflection effect and a production process therefor an optical member excellent in antireflection effect a water repellent film having excellent water repellency a substrate for mass spectrometry having high detection sensitivity a high accuracy phase plate and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure including multiple conical portions on a surface thereof in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores.
机译:本发明提供一种具有高抗反射效果的抗反射膜及其制造方法,该光学部件的抗反射效果优异,其具有优异的抗水性的防水膜,具有高检测灵敏度的质谱用基板,高精度的相位差板以及能够实现高精细化的结构。在前述及其生产方法中使用的“有机”。精细结构是在其表面上包括多个锥形部分的结构,其中,锥形部分具有介孔结构;介孔结构包括具有介孔的结构。

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