CARBON NANOTUBE SENSOR PRODUCTION METHOD FOR REMOVING GATING HYSTERESIS

摘要

The present invention provides a carbon nanotube sensor production method comprising the steps of: (a) forming an insulating film on a substrate; (b) forming multiple electrodes on the insulating film; (c) forming an OTS film on the insulating film; and (d) adsorbing carbon nanotube particles on the electrodes.