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VIBRATOR UNIT, TARGET SUPPLY DEVICE AND EXTREME UV LIGHT GENERATION SYSTEM

机译:振动器,靶材供应装置和极紫外光发生系统

摘要

The vibrator unit according to an embodiment of the present invention is a vibrator unit (310, 320, 330) for applying vibration onto a target material (271) that is supplied inside a target flow path (FL), and equipped with a vibrating element (314) vibrating in response to an electric signal of a predetermined frequency which is input from the exterior. The resonance frequency of the vibrating element may be a frequency that is different from the predetermined frequency of the electric signal. In addition, the vibrator unit according to another embodiment of the present invention is equipped with a vibration transmission member (311, 331) in contact with a first member (265, 260) containing therein the target flow path, and the vibrating element (314) in contact with the vibration transmission member. The specific frequency in the first order mode of the vibration transmission member may be a frequency that is different from the resonance frequency of the vibrating element.
机译:根据本发明的实施例的振动器单元是用于将振动施加到供应到目标流路(FL)内部的目标材料(271)上的振动器单元(310、320、330),并配备有振动元件。 (314)响应于从外部输入的预定频率的电信号而振动。振动元件的共振频率可以是与电信号的预定频率不同的频率。另外,根据本发明的另一实施例的振动器单元配备有与其中包含目标流路的第一构件(265、260)接触的振动传递构件(311、331)和振动元件(314)。 )与振动传递构件接触。振动传递构件的一阶模式中的特定频率可以是与振动元件的共振频率不同的频率。

著录项

  • 公开/公告号WO2016084167A1

    专利类型

  • 公开/公告日2016-06-02

    原文格式PDF

  • 申请/专利权人 GIGAPHOTON INC.;

    申请/专利号WO2014JP81259

  • 发明设计人 HIRASHITA TOSHIYUKI;

    申请日2014-11-26

  • 分类号H05G2;H01L21/027;

  • 国家 WO

  • 入库时间 2022-08-21 14:17:41

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