METHODS FOR TEXTURING A CHAMBER COMPONENT AND CHAMBER COMPONENTS HAVING A TEXTURED SURFACE

摘要

A method for a textured surface on a chamber component is provided and includes providing a chamber component, applying a Iayer of a photoresist to a surface of the chamber component, exposing a portion of the photoresist to optical energy using a m ask to cure a portion of the photoresist, removing uncured photoresist from the surface, and electrochemically etching the chamber component to form a textured surface on the chamber component.