METHODS FOR TEXTURING A CHAMBER COMPONENT AND CHAMBER COMPONENTS HAVING A TEXTURED SURFACE

摘要

There is provided a method for a textured surface on a chamber component comprising the steps of providing a chamber component, applying a layer of photoresist to the surface of the chamber component, using a mask to cure the portion of the photoresist Exposing a portion of the photoresist to optical energy, removing the uncured photoresist from the surface, and electrochemically etching the chamber component to form a textured surface on the chamber component .