首页> 外国专利> ORGANIC MEMBRANE DEPOSITION DONOR SUBSTRATE FOR DEPOSITING ORGANIC MEMBRANE BY USING JOULE HEATING AND METHOD FOR PRODUCING SAME

ORGANIC MEMBRANE DEPOSITION DONOR SUBSTRATE FOR DEPOSITING ORGANIC MEMBRANE BY USING JOULE HEATING AND METHOD FOR PRODUCING SAME

机译:用于通过焦耳加热来沉积有机膜的有机膜沉积施主基质及其制备方法

摘要

The present invention provides a method for producing an organic membrane deposition donor substrate for depositing an organic membrane by using Joule heating, and a donor substrate produced thereby. According to the present invention, a substrate is provided. A conductive metal membrane is deposited and patterned on one surface of the substrate, and a wall layer is formed on the patterned conductive metal membrane. A photoresist is deposited on the wall layer. The patterned conductive metal membrane is used as a mask on an opposite surface on which the conductive metal membrane is deposited, so a photoresist in a region corresponding to the patterned conductive metal membrane is removed through rear surface light exposing treatment. By using the photoresist as a mask, a part corresponding to the conductive metal membrane of the wall is removed through an etching liquid, and the remaining photoresist is removed. By using Joule heating, a uniform organic membrane pattern may be formed when an organic membrane is deposited. In the method for producing a donor substrate, a process is simple, and a wall pattern having excellent pattern precision may be formed.;COPYRIGHT KIPO 2016
机译:本发明提供了通过焦耳加热来制造用于沉积有机膜的有机膜沉积施主基板的方法,以及由此制造的施主基板。根据本发明,提供了一种基板。在基板的一个表面上沉积并图案化导电金属膜,并且在图案化的导电金属膜上形成壁层。光致抗蚀剂沉积在壁层上。图案化的导电金属膜用作在其上沉积有导电金属膜的相对表面上的掩模,因此通过背面光暴露处理去除与图案化的导电金属膜相对应的区域中的光致抗蚀剂。通过使用光致抗蚀剂作为掩模,通过蚀刻液去除与壁的导电金属膜对应的部分,并且去除剩余的光致抗蚀剂。通过使用焦耳加热,当沉积有机膜时可以形成均匀的有机膜图案。在该供体基板的制造方法中,工序简单,可以形成图案精度优异的壁图案。COPYRIGHTKIPO 2016

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