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ORGANIC MEMBRANE DEPOSITION DONOR SUBSTRATE FOR DEPOSITING ORGANIC MEMBRANE BY USING JOULE HEATING AND METHOD FOR PRODUCING SAME
ORGANIC MEMBRANE DEPOSITION DONOR SUBSTRATE FOR DEPOSITING ORGANIC MEMBRANE BY USING JOULE HEATING AND METHOD FOR PRODUCING SAME
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机译:用于通过焦耳加热来沉积有机膜的有机膜沉积施主基质及其制备方法
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摘要
The present invention provides a method for producing an organic membrane deposition donor substrate for depositing an organic membrane by using Joule heating, and a donor substrate produced thereby. According to the present invention, a substrate is provided. A conductive metal membrane is deposited and patterned on one surface of the substrate, and a wall layer is formed on the patterned conductive metal membrane. A photoresist is deposited on the wall layer. The patterned conductive metal membrane is used as a mask on an opposite surface on which the conductive metal membrane is deposited, so a photoresist in a region corresponding to the patterned conductive metal membrane is removed through rear surface light exposing treatment. By using the photoresist as a mask, a part corresponding to the conductive metal membrane of the wall is removed through an etching liquid, and the remaining photoresist is removed. By using Joule heating, a uniform organic membrane pattern may be formed when an organic membrane is deposited. In the method for producing a donor substrate, a process is simple, and a wall pattern having excellent pattern precision may be formed.;COPYRIGHT KIPO 2016
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