METHOD FOR FABRICATING CARBON NANOTUBE SENSOR AND CARBON NANOTUBE SENSOR FABRICATED THEREBY

摘要

The present invention relates to a method for fabricating a carbon nanotube sensor and the carbon nanotube sensor fabricated thereby, The method for fabricating a carbon nanotube sensor comprises the steps of: (a) forming an insulating film on a substrate; (b) forming a photoresist pattern in the form of a lattice or a stripe in the carbon nanotube adsorption region of the insulating film; (c) etching the insulating film according to the photoresist pattern; (d) adsorbing a carbon nanotube particle on the substrate in which the insulating film is etched; (e) removing a photoresist pattern of a substrate surface in which the carbon nanotube is adsorbed; and (f) forming an electrode on the insulating film in which the photoresist pattern is removed. The present invention is designed to provide a method for fabricating a carbon nanotube sensor and the carbon nanotube sensor fabricated, capable of arranging a carbon nanotube in a fixed direction.;COPYRIGHT KIPO 2016