METHOD FOR FABRICATING CARBON NANOTUBE SENSOR AND THE CARBON NANOTUBE SENSOR

摘要

The present invention provides a manufacturing method of a carbon nanotube sensor, which comprises the steps of: (a) absorbing carbon nanotube particles on a substrate; (b) forming a channel on the substrate onto which the carbon nanotube particles are absorbed; (c) depositing a metal film on the channel; (d) etching the carbon nanotube particles of a portion except the metal film to be eliminated; (e) forming electrodes on both sides of the channel; and (f) etching the metal film deposited on the channel to be eliminated. Therefore, the method can stabilize sensor manufacture.