GRAPHENE TRANSFER METHOD AND GRAPHENE TRANSFER APPARATUS USING VACUUM HEAT TREATMENT

摘要

Yeah Yeah's pin transfer method and a transfer device is provided with a pin. Specifically, the step of producing a graphene laminate a combination of support substrate and the graphene, and transferring the graphene graphene of the laminate with vacuum heat treatment the graphene laminate to the transfer destination substrate to the transfer destination substrate Yes it comprising the steps of: providing a graphene imaging apparatus that can perform the transfer of the pin and this way. Thus, by removing the components causing the doping (doping) between So by performing a transfer process of a graphene pin and the transfer destination substrate under a vacuum atmosphere yes maintain the properties of the pin and can be transferred. Also, well done to the pin transcription during heat treatment increases the adhesion of yes and yes the pin and transfer destination substrate can improve the transfer pin state.