METHOD FOR FORMING MONOLAYER TUNGSTEN DICHALCOGENIDE AND MONOLAYER TUNGSTEN DICHALCOGENIDE USING THE SAME

摘要

Disclosed is a monolayer tungsten dichalcogenide forming method. The monolayer tungsten dichalcogenide forming method includes: a step of arranging a ceramic boat on which a precursor solution containing a gold leaf layer and ammonium metatungstate (AMT) arranged in a lower side of the gold leaf layer and having an area corresponding to an area of the gold leaf layer is sprayed in a chemical vapor deposition (CVD) chamber; a step of supplying a hydrogen sulfide (H_2S) gas or a sodium hydrogen selenide (H_2Se) gas and a nitrogen (N_2) gas to the chamber; and a step of forming a monolayer of tungsten disulphide (WS_2) or tungsten diselenide (WSe_2) on the underside of the gold leaf layer by heating the gold leaf layer and the ceramic boat.