METHOD FOR FORMING MONOLAYER TUNGSTEN DICHALCOGENIDE AND MONOLAYER TUNGSTEN DICHALCOGENIDE USING THE SAME

摘要

A method for forming a single layer tungsten dicarcogenide is disclosed. A method of forming a monolayer tungsten dicarconeide includes forming a gold layer and a ceramic layer having a surface area corresponding to the area of the gold layer and disposed in the lower portion of the gold layer and containing a precursor solution containing ammonium metatungstate (AMT) Placing a ceramic boat in a chemical vapor deposition (CVD) chamber; Supplying a hydrogen sulfide (H ₂ S) gas or a hydrogen selenide (H ₂ Se) gas and a nitrogen (N ₂ ) gas into the chamber; And heating the gold foil layer and the ceramic boat to form a single layer of tungsten disulphide (WS ₂ ) or tungsten diselenide (WSe ₂ ) on the lower surface of the gold foil layer do.