METHOD OF FORMING A TEST STRUCTURE FOR DETECTING BAD PATTERNS AND METHOD OF DETECTING BAD PATTERNS AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME

摘要

A method for forming a test structure: classifies patterns formed within a chip into a plurality of groups; connects the patterns within each of the groups to each other to design the layout of chains; and forming the chains having the designed layout as a test structure in a certain area of the chip.