METHOD OF FORMING A TEST STRUCTURE FOR DETECTING BAD PATTERNS, AND METHOD OF DETECTING BAD PATTERNS USING THE SAME

摘要

A method of forming a test structure for detecting bad patterns includes classifying patterns in a chip into a plurality of groups, designing a layout of chains, the chains being formed by connecting the patterns in each of the groups to each other, and forming a test structure having the layout of chains in a region of the chip.