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BIO SENSOR USING SOLUTION-PROCESSED MULTI-STACKED OXIDE THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME

机译:使用溶液法多层氧化膜薄膜晶体管的生物传感器及其制造方法

摘要

The present invention relates to a biosensor and a manufacturing method for manufacturing the same. A biosensor according to an embodiment of the present invention includes: a substrate; A gate formed over the substrate; A gate insulating layer formed on the gate; A plurality of oxide semiconductor layers stacked on the gate insulating layer; And a source and a drain formed on the oxide semiconductor layer.
机译:生物传感器及其制造方法技术领域本发明涉及一种生物传感器及其制造方法。根据本发明实施例的生物传感器包括:基板;在衬底上方形成栅极;栅极绝缘层形成在栅极上;多个氧化物半导体层堆叠在栅极绝缘层上;并且在氧化物半导体层上形成源极和漏极。

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