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BIO SENSOR USING SOLUTION-PROCESSED MULTI-STACKED OXIDE THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
BIO SENSOR USING SOLUTION-PROCESSED MULTI-STACKED OXIDE THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
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机译:使用溶液法多层氧化膜薄膜晶体管的生物传感器及其制造方法
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摘要
The present invention relates to a biosensor and a manufacturing method for manufacturing the same. A biosensor according to an embodiment of the present invention includes: a substrate; A gate formed over the substrate; A gate insulating layer formed on the gate; A plurality of oxide semiconductor layers stacked on the gate insulating layer; And a source and a drain formed on the oxide semiconductor layer.
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