LCD OLED Electrostatic chuck for LCD or OLED manufacturing

摘要

In the present invention, since the temperature difference between the glass or semiconductor substrate surface mounted on the base is small, defects such as stains or photoresist burning occurring in the LCD or OLED process are reduced, and the arrangement of the gas holes has a shape that equally divides the front surface of the base The present invention relates to an electrostatic chuck having an improved gas hole formed therein for reducing process defects of an LCD or an OLED which can be easily applied to a glass having two to six masks. An electrode formed inside the base; A plurality of gas holes formed through the base from a front surface of the base to a rear surface of the base; And a gas path formed on a rear surface of the base and communicating with the gas hole, wherein the gas hole is formed on a first line that bisects the front surface of the base.