METHOD OF FABRICATING HYDROGEN SENSORS AND HYDROGEN SENSORS MANUFACTURED THEREBY

摘要

Hydrogen manufacturing method is provided and hydrogen is manufactured with identical. More specifically, hydrogen sensor is produced by the uneven part to form pattern of the self-assembled monolayer in template substrate with nano wire; Sensor base plate in template substrate is set, and to meet the top that polymeric layer is coated in flexible sensor substrate, sheet metal is deposited on bump on the self-assembled monolayer for depositing the sheet metal; There is metal nanobelt array outstanding nano gap pressure is applied to stamp substrate by removal template substrate to sensor base, be heat-treated stamp substrate; With the nano-band array of the prominent metal of upper formation first electrode and second electrode both ends. Hydrogen gas sensor, can reduce can protrusion in nanogap sensor substrate and metal nanobelt array due to extending through initially through the resistance increased between said electrodes; To be a significant increase the sensitivity to hydrogen, makes fast reaction and reduce speed. ;The 2016 of copyright KIPO submissions