Plants for applying multilayer coatings with specified ARCHITECTURE by magnetron reactive sputtering ion

摘要

The invention relates to the field of coating by magnetron ion reactive sputtering and can find application in various industries to harden the working surfaces of the deforming tool, friction pairs and so forth. Installation for applying multi-layer coatings with a given architecture for large slabs by magnetron-ion reactive sputtering, magnetron sputtering system comprising (IFA) disposed in a sealed vacuum working chamber system Itani IFAs, the vacuum system, the system of the gas inlet into the working vacuum chamber and a control unit IFA, characterized in that the installation is provided with a trolley to accommodate workpieces with a drive of its displacement, a pressure sensor and a gas flow controller, wherein the carriage drive, pressure sensor and regulator of gas flow MPC connected to a control unit adapted to change of the trolley speed depending on the gas flow and pressure within the working chamber, and IFA planar magnetrons consists of a permanent magnet, yc anovlennyh along vertical sidewalls in staggered rows. The technical result of the proposed utility model is to expand the functionality of installation possibilities.