Carousel type installation for magnetron sputtering of multilayer coatings and a method of magnetron sputtering of equal thickness nanocoating

摘要

1. Carousel-type apparatus for magnetron sputtering of multilayer coatings, containing a vacuum chamber, in the central part of which there is a planetary carousel gear with satellites for planetary motion of the sprayed parts on the satellites, a dual magnetron system consisting of two magnetrons, symmetrically inclined to the frontal plane of the vacuum chamber and directed by their targets towards the planetary mechanism, characterized in that it contains an additional single magnetron, setting enny side of the dual magnetron system in such a way that its plane of the target is perpendicular to the front plane of the camera and the target plane of symmetry passes through the center of rotation of the carousel; carousel planetary gear has the ability to independently reverse the directions of rotation of the carrier of the planetary gear and its satellites carrying sprayed parts, and changes in the ratio between the angular velocities of rotation of the carrier and satellites due to the presence of independent drives communicating rotational movements independent to the direction and ratio of values to the carrier and the internal gear planetary gear designed to rotate satellites with sprayed parts. 2. Method of magnetron sputtering of an equal thickness coating, comprising two transitions with successive deposition of two coating layers with complementary layer profiles on a flat surface of a part, which when applied to each other produce a resulting equal thickness coating, characterized in that the apparatus according to claim 1 is used; one complementary layer profile