机译:平面磁控溅射装置:新一代磁控溅射设计与技术
[1]Caucasus University, Tbilisi 0102, Georgia;
[2]LEPL Institute "OPTICA ", Tbilisi 0160, Georgia;
[2]LEPL Institute "OPTICA ", Tbilisi 0160, Georgia;
[2]LEPL Institute "OPTICA ", Tbilisi 0160, Georgia;
[2]LEPL Institute "OPTICA ", Tbilisi 0160, Georgia;