Installation for applying multilayer coatings with increased interlayer adhesion by magnetron sputtering

摘要

The utility model relates to the field of coating by magnetron sputtering and can be used in various industries to produce multi-layer thin-film structures for various purposes with increased interlayer adhesion and, consequently, increased reliability. The technical result of the utility model is an increase in interlayer adhesion in multilayer coatings due to the fact that a device connected in time controlling the operation of two switching power supplies of the corresponding magnetron sputtering systems (MPC) is added to the standard magnetron sputtering installation in such a way that in the process of obtaining a multilayer coating on the substrate, first a bottom layer of the first material is formed, then a controlled transition sublayer,